Modal Reconstruction Based on Arbitrary High-Order Zernike Polynomials for Deflectometry

Deflectometry is a non-destructive, full-field phase measuring method, which usually used for inspecting optical specimens with special characteristics, such as highly reflective or specular surfaces, well free-form surfaces. One of the important steps in method to retrieve surface from slope data points on sample map reconstruction. This paper proposes modal reconstruction using an adjustable number Zernike polynomials. In addition, proposed enables analyses practical surfaces that require infinite terms be represented. Experiments simulated indicated algorithm able reveal major-contributing terms, reconstruct micrometer-scale signal-to-noise ratio 10.